OHT（自動(dòng)搬運(yùn)設(shè)備)
華芯（嘉興）晶圓載具空中驅(qū)動(dòng)搬送車OHT，采用IPT(Inductive Power Transfer)非接觸式供電體系，可實(shí)現(xiàn)點(diǎn)對(duì)點(diǎn)跨Inter/Intra 傳送功能；符合SEMI標(biāo)準(zhǔn)，兼容8/12 inch料盒。
- 2-dimensional bar code defined position
- RFID reader in option for inventory check
- E84 & EAP communication by configurable
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| E84、SECS/GEM Communication |
安全規(guī)范 | |
| *提供12寸FAB的標(biāo)規(guī)天車/可依據(jù)8寸FAB客戶需求做客制化設(shè)計(jì) |
